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Thin film solid oxide fuel cells (TF-SOFCs) are considered to be a promising next generation energy conversion device. TF-SOFCs have many advantages such as rapid turn-on and off, fuel flexibility, material flexibility, high power density and availability of compact system. Electrodes and electrolytes of TF-SOFCs are fabricated by thin film processes. In order to fabricate high performance TF-SOFCs, proper thin film processes have to be used due to the unique requirements of each part of the TF-SOFCs. This paper reviews the thin film deposition process for fabrication of TF-SOFCs and the advantages and disadvantages of physical and chemical vapor deposition processes. In addition, materials prepared through thin film processes and the performance results of TF-SOFCs are reviewed.