P. Szollosi; P. Basa,; Cs Ducso; B Mate; M. Adam; T. Lohner; P. Petrik; B. Pecz; L. Toth; L. Dobos
(The Korean Physical Society, 2006-02)
In this study an investigation is presented on LPCVD deposited and annealed Si-rich SiNx layers on Si substrates. The samplestrical properties were studied as a function of annealing temperature. Systematic dependence of ...