Byungyoon Chu; Yang， Sung-Chae; Han Byeong Sung; Kiyoshi Yatsui; Jung-Hui Lee
(The Korean Institute of Electrical and Electronic Material Engineers, 2005-04)
Using intense pulsed ion beam evaporation technique, we have succeeded in the preparation of poly crystalline silicon thin films without impurities on silicon substrate. Good crystallinity and high deposition rate have ...