J. -B. Kim; Suck-Joo Na; W. -S. Chang; M. -J. Choi
(대한기계학회, 2005-11)
Near-field scanning optical microscopy(NSOM) coupled with laser is used in nano-scale processing to make nano-scale dots or nano-scale structure. Nano-sclae processing using NSOM coupled with laser can be applied to photo- ...